Document Type

Article

Version

Publisher's PDF

Publication Title

Applied Physics Letters

Volume

77

Publication Date

2000

Abstract

We fabricated Si 1-xGex/Si photodetectors by using a staircase band gap Si 1-xGex/Si structure. These devices exhibit a high optical response with a peak responsive wavelength at 0.96 μm and a responsivity of 27.8 A/W at -5 V bias. Excellent electrical characteristics evidenced by good diode rectification are also demonstrated. The dark current density is 0.1 pA/μm2 at V bias, and the breakdown voltage is -27 V. The high response is explained as the result of a staircase band gap by theoretical analysis.

DOI

10.1063/1.1286958

Included in

Physics Commons

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